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High quality vacuum magnetron sputtering machine system
High quality vacuum magnetron sputtering machine system
High quality vacuum magnetron sputtering machine system
High quality vacuum magnetron sputtering machine system

High quality vacuum magnetron sputtering machine system

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US $3600
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Quick Details

Characteristics:
high automation, fast pumping rate.
Name:
high vacuum magnetron sputtering machine system

Quick Details

Place of Origin:
Guangdong, China
Material:
Stainless steel
Moder:
side guide
Characteristics:
high automation, fast pumping rate.
Name:
high vacuum magnetron sputtering machine system
Product Description

System specification of Vacuum coating machine


Vacuum coating machine

Power specifications

220V 3 PHASE ,60A × 1 set,30A × 2 set

Power specifications

System with turntable

High vacuum pump

High vacuum refrigeration pump 10 inch (CTI Torr 10)

Crude vacuum pump

Mechanical pump, pumping rate :1000L/min

Vacuum studio

Stainless steel, circulating cooling water pipe

Sputtering target

5×22 inch Magnetic field plane cathode ×3

Vacuum measurement

Low vacuum gauge TC gauge 1.0E3-1.0E-3 Torr

High vacuum gauge  Ion gauge 1.0E-3-1.0E-6 Torr

Sputtering power

6kw DC power supply ×3

Process control

Fully automatic / manual control unit for touch screen operation

Process gas

Argon  0-200sccm

Working pressure

1.5E-1-1.0E-5 Torr

System sturcture drawing

Machine speed of Vacuum coating machine

coarse vacuum

high vacuum

Sputtering time

3~5 Min

10~15 Min

10 Min

Time / furnace

8hours/furnace

8H/furnace

30 Min

16 batch

16 batch

Capacity table (Medium substrate  0603)

Frame /furnace

furnace /(8H)

Bar / frame

Grain / strip

256

16

142

70

8hours/day

day/month

Frame rate

The total output of the subtotal

3

30

85%

30 Billion Billion

Application

To cooperate with the customers require to reduce the production cost, the company research and develop of this system, a new generation of vacuum coating equipment. Its characteristics are: high automation, fast pumping rate.

A wheel design patent, greatly improve the efficiency of vacuum coating film.

The single chamber operation can reduce the repair cost; at the same time will make the three sputtering target coating and the  coating time is short.

Features:

Reasonable design

High-efficiency

Low consumption, energy saving

Easy to maintain

Easy to operate

We also supply automation machine :

Our Services

Service we can supply:

We can not only provide the good machines, but also wholeheartedly provide the comprehensive for our clients. The series of professional technology service will make you have an excellent product experience.

After-sales service support

After we signed the purchase contract and have a certain reputation guarantee, we will contact the professional group that responsible for ship bookings, commodity inspection, commercial invoices, packing list, insurance policy and so on, in order to provide you the perfect goods trading services, until the product you purchased properly to your hands.

Technological support

Yutsai has been largely adopting new technologies, new techniques and high-tech equipments. And Yutsai also has strict and effective quality control system.

The component we use is our own design products.

Our equipment is widely used in many kind of area:

Package and shipping and work shop:

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