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2" Straight Head High Vacuum Magnetron Sputter Source with optional Quick Connector - HVMSS-SPC-2S

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US $1000
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Quick Details

Voltage:
HVMSS-SPC-2S
Power:
DC (Max.) 1000 W
Dimension(L*W*H):
Total Length: 14"
Warranty:
1 Year
Weight:
1.6kg
Certification:
ce
Product name:
2" Straight Head High Vacuum Magnetron Sputter Source
DC (Max.):
1000 W
RF (Max.):
RF (Max.) 500 W
Sputtering Current (Max.):
3 Amp
Sputtering Voltage:
100-1000 V
Sputtering Pressure:
5-100 mTorr
Application:
fim coating
warranty:
1 year
contact mobile:
0086 18135778330

Quick Details

Place of Origin:
Henan, China
Brand Name:
TCH
Model Number:
220V
Voltage:
HVMSS-SPC-2S
Power:
DC (Max.) 1000 W
Dimension(L*W*H):
Total Length: 14"
Warranty:
1 Year
Weight:
1.6kg
Certification:
ce
Product name:
2" Straight Head High Vacuum Magnetron Sputter Source
DC (Max.):
1000 W
RF (Max.):
RF (Max.) 500 W
Sputtering Current (Max.):
3 Amp
Sputtering Voltage:
100-1000 V
Sputtering Pressure:
5-100 mTorr
Application:
fim coating
warranty:
1 year
contact mobile:
0086 18135778330

2" Straight Head High Vacuum Magnetron Sputter Source with optional Quick Connector - HVMSS-SPC-2S

Product Description

The HVMSS-SPC-2S is a Straight Head 2" diam. circular magnetron sputtering gun, such as metallic/insulating or magnetic/non-magnetic. The circular rare-earth NdFeB permanent magnet is implemented to ensure excellent film uniformity and target utilization. Such a sputtering gun is easy to operate and maintain. Installation is straight forward and it can be operated with either DC or RF power supply.

Specification of the 2" Straight Head High Vacuum Magnetron Sputter Source with optional Quick Connector - HVMSS-SPC-2S

Features
  • Made of high-quality materials of stainless steel and ceramics.
  • Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile.
  • The magnet is coated with protective material against cooling water corrosion to maximize durability.
  • Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies.
  • The low impedance sputtering heads are easily interfaceable with an external power supply.
  • Easy to install a standard fitting with option  quick connector
  • 2" Copper Backing Plate  (EQ-CBP-2) is included.
  • Target replacement is easy and  no need to adjust the gun to fit targets with different height.
Replacment for DC/RF Dual-Head High Vacuum 2” Magnetron Plasma Sputtering Coater - VTC-600-2HD
2" RF Plasma Magnetron Sputtering Coater for Non-Conductive Thin Films - VTC-2RF
Power Requirement
  • DC (Max.) 1000 W
  • RF (Max.)  500 W
Electrical Connection Type


  • Standard HN Female Connector is included (DC and RF, )
  • Optional SL16 cable Connector
  • 148 cm RF cable is recommended with extra cost
Sputtering Current (Max.) 3 Amp
Sputtering Voltage 100-1000 V
Sputtering Pressure 5-100 mTorr
Dimensions
  • Anode Shield Diameter: 3.5"
  • Total Length: 14"


Sputtering Target
  • Diameter:                         2.0" (50.8mm)
  • Thickness:                       up to 1/4" for non-magnetic target; up  to 1/16" for magnetic target
  • Utilization:                        up to 30%
  • Magnet:                            NdFeB Rare Earth Magnet

Cooling Water Requirement
  • Flow Rate:                         0.8 GPM
  • Water Inlet Temperature:     <20 C
  • Water tubing:                     0.25" O.D.
Mounting
  • Feedthrough:                      3/4" O.D.tube
Net Weight 3.5 lbs



Accessories
  • High vacuum Quick connector with 0.75" ID is optional. Use this component to install the sputtering source onto the baseplate (up to 1” thick) of a vacuum chamber with 1” diameter through-hole at easy
  • 6" CF flange with  a high vacuum feedthrough is available upon request at extra cost . The sputtering head can be easily installed on the 6'' CF vacuum flange through the quick disconnector. The height position of the sputtering gun can be manually adjusted inside the vacuum chamber.
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost ,
Warranty One year limited with lifetime support

reference of the 2" Straight Head High Vacuum Magnetron Sputter Source with optional Quick Connector - HVMSS-SPC-2S

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