- Product Details
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Quick Details
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Model Number:
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p22-03
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Application:
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heat treatment units for semiconductors, LPCVD units
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Feature:
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Undergoes little compressive permanent strain, high temperature
Quick Details
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Size:
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JIS B 2401 (P, G, V), AS568B, others
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Place of Origin:
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Japan
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Brand Name:
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TOMBO
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Model Number:
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p22-03
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Application:
-
heat treatment units for semiconductors, LPCVD units
-
Feature:
-
Undergoes little compressive permanent strain, high temperature
Products Description
BLAZER™ NEXT is PERFLUORO ELASTOMER which has excellent heat resistance and plasma resistance.
It has good sealing performance even under severe environments, which is difficult to realize using other elastomer materials.
■Features
・Rough value of heat resistance: 335℃
・Standard hardness (Duro A): 76
・Undergoes little compressive permanent strain when subjected to high temperature, and can therefore be expected to realize stable sealing performance over a long period.
■Applications
・Sealing of heat treatment units for manufacturing semiconductors and LCD concerning which heat resistance is particularly necessary (annealing furnaces, LPCVD units, etc.)
・Sealing of units, piping and valves used in various industrial fields
■Precaution for use
BLAZER™ NEXT undergoes large thermal expansion, so it may sometimes be subjected to excessive compression when used at high temperature (250℃ or higher). Care must be taken, particularly when the compressibility (at normal temperature) is 20% or more. For details, please contact us.
■350℃ free heating test
■Compressive permanent strain test results
■NICHIAS Blazer™ Series
Product Name
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TOMBO No.2670-BNX Blazer Excellent heat and plasma resistance rubber O ring
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Brand Name
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TOMBO
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Place Of Origin
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Japan
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