- Product Details
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Quick Details
-
Voltage:
-
220V
-
Power:
-
1000w
-
Dimension(L*W*H):
-
480 mm L x 320 mm W x 280 mm H
-
Warranty:
-
1 Year
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Weight:
-
20KG
-
Certification:
-
CE
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Product name:
-
Mini Plasma Sputtering Coater
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Application:
-
for making metallic coatings
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voltage:
-
208 - 240 VAC, 50 / 60 Hz
-
Chamber size:
-
100 mm ID x 130 mm H
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Chamber material:
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fused glass
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Sputtering distance range:
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15 - 80 mm adjustable
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stage size:
-
40 mm Dia.
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Sputtering timer:
-
0 - 110 s adjustable
-
warranty:
-
1 year
-
contact mobile:
-
0086 18135778330
Quick Details
-
Place of Origin:
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Henan, China
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Brand Name:
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TCH
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Model Number:
-
TCH-GSL-1100X-SPC12
-
Voltage:
-
220V
-
Power:
-
1000w
-
Dimension(L*W*H):
-
480 mm L x 320 mm W x 280 mm H
-
Warranty:
-
1 Year
-
Weight:
-
20KG
-
Certification:
-
CE
-
Product name:
-
Mini Plasma Sputtering Coater
-
Application:
-
for making metallic coatings
-
voltage:
-
208 - 240 VAC, 50 / 60 Hz
-
Chamber size:
-
100 mm ID x 130 mm H
-
Chamber material:
-
fused glass
-
Sputtering distance range:
-
15 - 80 mm adjustable
-
stage size:
-
40 mm Dia.
-
Sputtering timer:
-
0 - 110 s adjustable
-
warranty:
-
1 year
-
contact mobile:
-
0086 18135778330
Mini Plasma Sputtering Coater with Vacuum Pump & Gold Target TCH-GSL-1100X-SPC12
TCH-GSL-1100X-SPC12 is a compact plasma sputtering coater designed for making metallic coatings, such as gold, platinum, Indium and silver etc. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), vacuum pump, stainless steel bellows and quick clamps.
Specification of the Mini Plasma Sputtering Coater :
|
Input Power
|
Single phase 208 - 240 VAC, 50 / 60 Hz < 1000 W (including vacuum pump) |
|
Vacuum Chamber
|
Vacuum chamber: 100 mm ID x 130 mm H, made of fused glass Sealing flange made of stainless Needle valve on front panel for gas flow control |
|
Sample Stage
|
Stage size: 40 mm Dia. Sputtering distance range: 15 - 80 mm adjustable |
|
Control Panel |
Vacuum gauge and sputtering current meter for monitoring deposition Needle valve on front panel for gas flow control Sputtering timer: 0 - 110 s adjustable |
|
Vacuum Pump (optional)
|
156 L/m Double Stage Rotary Vane Vacuum Pump with vapor trap (Max vacuum 1.0E-2 Torr) Stainless steel bellows with KF16 adapter and quick clamps Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination One High purity Au target (57 mm Dia. x 0.12 mm, 4N purity) included. Note: you may use a turbo pump to achieve 1.0E-5 Torr vacuum by a turbo pump (please order with extra cost) |
|
Sputtering Targets |
Target size requirements: 57 mm Dia. x 0.5 mm max 4N purity gold foil: 57 mm Dia. x 0.12 mm (Included and pre-installed on coater)
Optional Targets are available (C ontact to order) Au target (57 mm Dia. x 0.12 mm, 4N purity) Pt target (57 mm Dia. x 0.12 mm, 4N purity) Ag target (57 mm Dia. x 0.5 mm, 4N purity) |
|
Size |
480 mm L x 320 mm W x 280 mm H |
|
Net Weight |
20 kg |
|
Shipping Weight |
55 kg (120 lbs) with 1020 mm x 790 mm x 560 mm |
|
Compliance |
CE approval |
|
Warranty |
One year limited warranty with lifetime support |
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