1700C Tube Furnace with High Vacuum System MFC Gas Mixer / CVD tube furnace

basic introduction

KJ-1600X-4-HVC2 is CE certified  4" diameter single zone alumina tube furnace with high vacuum pump system (up to 10 ^-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600ºC.

CVD tube furnace

Specifications

KJ-1700X series tube furnace	Double layer steel casing with air cooling. Two cooling fans inside to keep  case temperature < 55°C. High purity Alumina refractory chamber Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel. Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
	Material: High Purity Alumina One processing tube is included with the furnace. 4.1 "OD x 3.625 " ID x 40 " L Alumina Ceramic Tube (99.8%)
	6KW
	AC 208-240V Single phase, 50/60Hz
	8 pcs 1800°C grade MoSi2 heating element
	Max. Heating Temp.: 1650°C Continuous Working Temp.: 1600°C
	<=5°C/min
	Heating zone length: 457 mm (18") Constant Temperature Zone length: 150 mm (6")(+/-1°C)
	PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments. Temperature accuracy: ±1°C Thermocouple: B type built inside the furnace
	One pair of stainless steel vacuum flange with: - one digital vacuum gauge - two needle valves - one KF-25 connector  and KF-25 to KF-40 adapter for the high vacuum station. - one 1/4" Swagelok tube connector
	550 x 380 x 520
	Reference picture of the tube furnace
High Vacuum Station	100~110W
	AC 208-240V Single Phase, 50/60Hz
	600(L) x 600(W) x 700(H), mm
	Mobile cart size:  600 (L) x 600 (W) x 700(H), mm Max. Loading:       600 Lbs on top Molecular pump control Panel :   LCD digital Inside:   Pfeiffer vacuum pump  made in Germany Vacuum sensor is included
	One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button. System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber. Self protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum. LCD screen - double lines parameters checking interface make the working easier to be handled.
	Nitrogen   N2     33 L/s Helium      He     39 L/s   (2340L/minute) Hydrogen H2   32 L/s
	From 1000 mbar to <1E-7 mbar
	<1E-8 mbar (without any leaking )
Mass Flow Gas Control	Made of 316 stainless steel Gas mixing tank: Φ80X120mm Dimension: 600(L) x 600(W) x 700(H), mm Three Channels MFC control panel The flow rate control range and number of gas routes are available for customization. Please contact us for detail information.
	18W per channel
	AC 208-240V, Single phase, 50/60Hz
	Please select the number of gas routes in the option bar to update the price
Application Notes	How to use and maintain Alumina tube in 1 high temperature tube furnace . In order to obtain accurate temperature inside tube furnace, a temperature calibration is needed before use; please click here to learn how . How to set up ceramic tube and vacuum flange for 1 Tube furnace . Vacuum pressures may only be safely used up to 1500°C for alumina tubes The tube furnaces with alumina tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
Warranty	One year limited warranty
Compliance	CE Certified

CVD tube furnace

Furnaces of cvd tube furnace in factory

CVD tube furnace

Packing and shiping

CVD tube furnace

our factory:

CVD tube furnace

Customer visit receipt photo

CVD tube furnace

company information

Kejia Electric Furnace is a manufacturer specializing in the production of heat treatment equipment. It has 10 years of research and development, production and sales experience. The company's products mainly include: muffle furnace, tube furnace, atmosphere furnace, vacuum furnace, CVD tube furnace system, dental furnace and so on. Widely used in powder metallurgy, vacuum brazing, annealing and other lingyu products sold to more than 30 countries and regions abroad, each product has CE certification, the use of products has received good feedback from customers, but we have not stopped research and upgrade The pace of the product. I look forward to our opportunity to cooperate.