- Product Details
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Quick Details
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Brand Name:
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SCK
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Voltage:
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Single-phase 220 VAC 50 / 60 Hz
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Power:
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2000W
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Dimension(L*W*H):
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48" * 28" * 32"
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Weight (KG):
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160
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Product name:
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compact magnetron sputtering system
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Magnetron Sputtering Head:
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Two pieces
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Vacuum chamber:
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300 mm Dia. x 300 mm
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Target size requirement:
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2" diameter
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Source Power:
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1DC/1RF
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Sample holder size:
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140 mm Dia
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Rotation speed:
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1 - 20 rpm adjustable
Quick Details
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Machine Type:
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coating, Coating Equipment
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Marketing Type:
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2024
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Place of Origin:
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Henan, China
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Brand Name:
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SCK
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Voltage:
-
Single-phase 220 VAC 50 / 60 Hz
-
Power:
-
2000W
-
Dimension(L*W*H):
-
48" * 28" * 32"
-
Weight (KG):
-
160
-
Product name:
-
compact magnetron sputtering system
-
Magnetron Sputtering Head:
-
Two pieces
-
Vacuum chamber:
-
300 mm Dia. x 300 mm
-
Target size requirement:
-
2" diameter
-
Source Power:
-
1DC/1RF
-
Sample holder size:
-
140 mm Dia
-
Rotation speed:
-
1 - 20 rpm adjustable
lab High quality Double Head Vacuum Magnetron Sputter Coating System for Metal and Nonmetal Film on Wafers
SCK-MSP300S-DCRF is a compact magnetron sputtering system with dual 2" target sources, e.g., one DC source for coating metallic film, and the other RF source for coating non-metallic material. This coating system is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc..
(factory supply,Support customization, including accessories and consumables, please contact our staff for details.)
SPECIFICATIONS
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Input Power |
Single phase 220 VAC, 50 / 60 Hz Total power: 2.5KW (including vacuum pump and water chiller) |
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RF Power Supply |
One 13.56 MHz, 300 W auto-match RF generator is included and connected to the sputtering head. |
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DC Power Supply |
One 500W DC power supply is included for metallic target sputtering. |
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Sample stage |
Dimension: φ185mm Heating temperature: Max 500℃ Temperature control accuracy: ±1℃ Rotate speed: 1-20rpm adjustable |
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Magnetron Sputtering Gun |
Dimension: 2 inches (can be customized)
Water chiller: Circulating water chiller with flow rate of 10L/min
Cooling mode: Water cooling |
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Vacuum chamber |
Chamber size: φ300mm×300mm Glass window: φ100mm Chamber material: Stainless steel Opening mode: Top cover open |
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Mass flowmeter |
2 channels; measuring range 100sccm (can be customized according to customer needs) |
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Vacuum system |
TYFB-600 molecular pump: pumping rate 600 L/s
VRD-4 Two-stage rotary vane vacuum pump: pumping rate 4 L/s Ultimate Vacuum: 3x10-6 Pa Vacuum gauge: compound vacuum gauge Power supply: AC220V 50/60Hz
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Film Thickness Monitoring System |
Resolution: +/- 0.03Hz (5-6MHz), 0.0136Ã Accuracy: +-/05% thickness Measurement speed: 100mS-1S adjustable Measurement range: 500 000Ã Standard sensor crystal: 6MHz Analog output: 8 bit resolution, PWM Monitor connects the computer to display or connect the display by software |
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Overall size |
600mm*650mm*1280mm |
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Total Weight |
300kg |
More detailed pictures
PACKAGE:
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
DELIVERY TIME:15-20 days after confirming order,detail delivery date should be decided according to production season and order quantity.
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1.Telegraphic transfer
2.Western Union
3.Secure Payment through Alibaba
4.L/C
