CVD system used for laboratory crystal growth/ graphene CVD furnace / CVD machine for graphene growth furnace

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US $3500

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Quick Details

Max. temperature:: 1200c

working temperature:: 1100c

heating element:: resistance wire

thermocouple:: K type

temperature controller:: PID controller

temperature accuracy:: 1 C

furnace details:: can be designed as your requirement

warranty:: 1 year

payment:: T/T, L/C

Quick Details

Brand Name:: Kejia

Model Number:: KJ-1200 CVD

Place of Origin:: Henan, China

Max. temperature:: 1200c

working temperature:: 1100c

heating element:: resistance wire

thermocouple:: K type

temperature controller:: PID controller

temperature accuracy:: 1 C

furnace details:: can be designed as your requirement

warranty:: 1 year

payment:: T/T, L/C

KJ-1200CVD system is a special RTP tube CVD system designed for laboratory graphene growthing, coating thin film on the metal foil, especially for preparing flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace.

Features:

Dual quartz tube:100mm dia. outside tube and suspended by 80 mm diameter tube inside. Metallic foil will be wrapped around interior tube surface for CVD reaction.
Vacuum sealed flanges for dual tube, which allow reactive gas to go through between two tubes ( 10mm space ) for reaction, and inert gas to go through center tube for cooling.
2 gas channels controlled by 2 separate digital MFC's
High speed mechanical vacuum pump is included with KF25 adapter and pipe
Sliding rail is installed on the bottom of furnace, which allows for fast heating or cooling by sliding furnace from one side to the other side.

Specifications:

Furnace Structure	High purity Al2O3 insulation chamber grantees excellent temperature uniformity. Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation. Sliding flange assembly are made of stainless steel.
Power	Power: 208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)
Heating Temperature	Max. Temperature: 1200°C Continuous Temperature: 1100°C
Heating Zone	Heating zone length: 440mm Constant temperature heating zone length: 120 (±1°C) @400~1100°C The tube diemater and the heating zone length, heating zone number is customized! All the furnace details can be designed with your requirememt.
Heating & Cooling Rate	Max. heating and cooling rates depend on working temperature. you can move the furnace chamber to get high cooling & heating rate.
Fused Quartz Tube	Outer tube: OD: 4"x ID: 3.8"X 58.3" Length (OD100 x ID 96 x 1480 mm ) Inner tube: OD:3.15: x ID x 2.95" x 60.6" Length (OD80 x ID 75 x 1540 mm )
	One pair of flange made of SS304, which seals tightly between tubes by double high temperature O-rings to achieve high vacuum. One pair of sliding rail is installed on bottom of furnace Split furnace can be moved manually from one side to the other to achieve fast heating or cooling. Processing tube and flange , as well as sliding rail are fixed on bottom cart. In order to achieve Max. heating rate, you can preheat the furnace first, then slide the heated furnace to sample end In order to achieve Max. cooling rate, push furnace to other end, then forcing air cooling sample end Ultimate vacuum pressure: 10^-2 torr (by mechanical pump) 10^-5 torr (by turbo molecular pump)
Temperature Controller	Temperature Controller: 30 segment programmable with PID tuning & Over temperature protection. Temperature accuracy: +/-1°C Also can design the controller with your requirement.
Gas Mix Station	Four precision mass flow controller ( MFC) with digital display are installed on the bottom case to control gas flow rate automatically. MFC 1: Control range from 0~100 sccm MFC 2: Control range from 0~200 sccm or can be designed as your requirement! Gas route: 2 routes Flowing rate accuracy: 0.2% accuracy Gas inlet and outlet: 1/4" swagelok tube connector One gas mixing tank is installed on bottom case with liquid release valve. Each gas route has a SS needle valve to on-off control independently. The flow rate is adjustable in the MFC panel.
Vacuum Pump	Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. vacuum pressure 10 -2 Torr. KFD25 adapter and stainless steel pipe are connected between pump and tube flange with a right-angle vacuum valve . Digital vacuum pressure gauge and display are installed with the furnace. Optional: 1. You may choose low vacuum dry vacuum pump for zero contamination. 2. You may choose molecular pump at extra cost to reach high vacuum pressure up to 10-5 Torr.
25um Thickness Copper Foil as Substrate (optional)	Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u:
Dimension	Furnace: 550 x 380 x 520 Bottom Mobile case: 600x600x597
Net Weight	300 lb
Warranty	One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty.)
Certificate	CE certified