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Compact Magnetron Plasma Sputtering Coater with film thickness tracking system
Compact Magnetron Plasma Sputtering Coater with film thickness tracking system
Compact Magnetron Plasma Sputtering Coater with film thickness tracking system
Compact Magnetron Plasma Sputtering Coater with film thickness tracking system

Compact Magnetron Plasma Sputtering Coater with film thickness tracking system

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≥1 Sets
US $6000
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Quick Details

Voltage:
220V
Power:
2 KW
Dimension(L*W*H):
360x300x380mm
Warranty:
one year
After-sales Service Provided:
No overseas service provided
target:
customized
Specimen chamber:
Fused glass tube
Size:
customized
Delivery:
timely
Weight:
60KG
Certification:
CE

Quick Details

Place of Origin:
Henan, China
Brand Name:
Kejia
Model Number:
Compact magnetron plasma sputtering coater
Voltage:
220V
Power:
2 KW
Dimension(L*W*H):
360x300x380mm
Warranty:
one year
After-sales Service Provided:
No overseas service provided
target:
customized
Specimen chamber:
Fused glass tube
Size:
customized
Delivery:
timely
Weight:
60KG
Certification:
CE

Compact Magnetron Plasma Sputtering Coater with Vacuum Pump & Water Chiller

KJ -1100X-SPC-16M is a single target Compact Magnetron Plasma Sputtering Coater with Double Step Rotary Vane

Vacuum Pump . One magnetron with Peltier cooling device is installed on top of machine. One Gold target and

vacuum pump are included for immediate use.

Technical parameter of compact Magnetron Plasma Sputtering Coater

Input Voltage

220V (110V is available with a transformer at extra cost), 50/60 Hz

Input Power

< 2000W (including pump)

Output Power

1600VDC

50mA max.

Specimen chamber

Fused glass tube, 160 mm Dia. x 120mm Height

Specimen stage

One 50 mm Dia.sample stage

Max. coating area: 45 mmilable

Accessories included

Double Step Rotary Vane Vacuum Pump (external) with Pirani gauge and

Vapor trap eliminates the oil mist

Stainless steel bellows with KFD-25 adapter and clamps

16L/min recirculating water chiller is included  to cool magnetron head.

Gas Atmosphere

One needle valve installed to allow Ar gas inlet to achieve better plasma coating

Target

One Au target: 50 mm dia. x 0.12 mm, 1pcs is included

Optional targets:

Pt target (47mm dia.x0.12mm, 4N) available

Ag target (47 mm dia. x 0.5mm, 4N) available

Overall Dimensions

L360mm x W300mm x H380mm

Warranty & Certificate

One year limited with lifetime support

CE certified

Knowledge of Sputter Coating

For the best film strength, please use plasma cleaner to clean the

sample surface before coating

For coating light weight metallic materials such as Al. Zinc and graphite,

the sputtering coating is not efficient due to low energy, please consider

using a thermal evaporating coater

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