Dual-Head Magnetron Plasma Sputtering system with 2

Dual-Head Magnetron Plasma Sputtering system with 2" High Vacuum Magnetron Sputter Source for Semiconductor film

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≥1 Sets

US $45662

≥2 Sets

US $45600

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Quick Details

voltage:: 220VAC 50/60Hz, single phase

power:: 2000w

source power:: Two sputtering power

vacuum chamber size:: 300 mm Dia x 300 mm height

Sample holder size:: 140mm dia. for. 4" wafer max

Sample holder rotation speed:: 1 - 20 rpm for uniform coating adjustable

Flow rate.:: 200 ml/min max

Keywords:: Magnetron Sputter Source

Weight:: 160KG

Certification:: CE

Quick Details

Place of Origin:: Henan, China

After-sales Service Provided:: Online support, Engineers available to service machinery overseas

Product:: Magnetron Plasma Sputtering Coater system

voltage:: 220VAC 50/60Hz, single phase

power:: 2000w

source power:: Two sputtering power

vacuum chamber size:: 300 mm Dia x 300 mm height

Sample holder size:: 140mm dia. for. 4" wafer max

Sample holder rotation speed:: 1 - 20 rpm for uniform coating adjustable

Flow rate.:: 200 ml/min max

Keywords:: Magnetron Sputter Source

Weight:: 160KG

Certification:: CE

Dual-Head Magnetron Plasma Sputtering system with 2" High Vacuum Magnetron Sputter Source for Semiconductor film

Product Description

Brief introduction of the magnetron sputtering system:

VTC-600-2HD is a compact magnetron sputtering system with dual 2" target sources, e.g., one DC source for coating metallic film, and another RF source for coating non-metallic material. A film thickness tracker is included to enable the user to control processing easily. This coater is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE etc. at low cost.

Specification of the DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system

Compact Structure
Input Power	220VAC 50/60Hz, single phase 2000W (including pump)
Source Power	Two sputtering power sources are integrated into one control box DC source: 500W for coating metallic materials RF source: 600W with automatching for coating non-metallic materials ( Center) Compact 300 RF source is available at extra cost
Magnetron Sputtering Head	Two 2" Magnetron Sputtering Heads with water cooling jackets are included One is connected to RF power supply for no-conductive materials Another is connected to DC sputtering power source for coating metallic materials Target size requirement: 2" diameter Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets One stainless steel and one Al2O3 ceramic targets are included for demo testing Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads Customized coater: Two DC head without, RF sputtering, RF head without DC sputering, 3 RF head are available upon request
Vacuum Chamber	Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel Observation Window: 100 mm diameter Hinged type cover on top with air spring sport makes target exchange easy
Sample Holder	Sample holder size: 140mm dia. for. 4" wafer max (also can be designed as your requirement) Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C
Gas Flow Control	Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in Flow rate: 200 ml/min max. Flow rate is adjustable on the 6" touch screen control panel
Vacuum Pump Station	High speed turbo vacuum pump system (made in Germany) is directly installed on the vacuum chamber for max. vacuum level Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed Mobile pump station is included and the compact sputtering coater can be put on top of station Max. vacuum level: 10^-6 torr with chamber baking
Thickness Monitor	One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å LED Display Unit outside chamber can:5 pcs quartz sensors (consumable) are included Input material to be coated according to data base included Display total thickness coated and coating speed Water cooling is required
Overall Dimensions	L1300mm× W660mm× H1200mm
Net Weight	160 kg
Warranty	One years limited warranty with lifetime support
Application Note	In order to remove oxygen from the chamber, suggest you use 5% Hytrogen + 95 % Nitrogen to clan chamber 2-3 times, which can reduce oxygen to below 10 ppm Please use > 5N purity Argon gas for plasma sputtering. Even though 5N purity Ar, usually contain 10- 100 ppm oxygen and H2O

Display of the DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system

Company Introduction

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.

Package

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A. 1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A. T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A. 1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service