- Product Details
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Quick Details
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Voltage:
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Specially customized as clients' local power
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Power:
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2000 W
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Dimension(L*W*H):
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48" * 28" * 32"
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Weight (KG):
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160
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Product name:
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Plasma Magnetron Sputtering Coater
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Keywords:
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Magnetron Sputtering Coater
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Input Power:
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Single-phase 220 VAC 50 / 60 Hz
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DC source:
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500 W
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RF source:
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300 W power, 13.56 MHz frequency
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Target size requirement:
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2" diameter
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Thickness range:
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0.1 - 5 mm
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Vacuum chamber:
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300 mm Dia. x 300 mm Height
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Sample holder size:
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140 mm Dia. for. 4" wafer max
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The holder temperature:
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adjustable from RT to 500 °C max
Quick Details
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Machine Type:
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Plasma Magnetron Sputtering Coater, Pre-treatment Equipment, Coating Equipment
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Place of Origin:
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Henan, China
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Brand Name:
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MTI
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Voltage:
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Specially customized as clients' local power
-
Power:
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2000 W
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Dimension(L*W*H):
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48" * 28" * 32"
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Weight (KG):
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160
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Product name:
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Plasma Magnetron Sputtering Coater
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Keywords:
-
Magnetron Sputtering Coater
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Input Power:
-
Single-phase 220 VAC 50 / 60 Hz
-
DC source:
-
500 W
-
RF source:
-
300 W power, 13.56 MHz frequency
-
Target size requirement:
-
2" diameter
-
Thickness range:
-
0.1 - 5 mm
-
Vacuum chamber:
-
300 mm Dia. x 300 mm Height
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Sample holder size:
-
140 mm Dia. for. 4" wafer max
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The holder temperature:
-
adjustable from RT to 500 °C max
Plasma M agnetron Sputtering Coater with Three Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD
VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery) . This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc.
SPECIFICATIONS
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· Single-phase 220 VAC 50 / 60 Hz · 2000 W (including a vacuum pump and water chiller) |
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· Three sputtering power sources are integrated into one control box o DC source: 500 W power for coating metallic materials o RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials |
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· Three 2 inches sputtering heads with water cooling jackets and shutters are included (Click 1st pic from left) o Target size requirement: 2" diameter o Thickness range: 0.1 - 5 mm for both metallic and non-conductive targets (including the backing plate) · Customized coater: Two DC - One RF; Two RF - One DC; Three DC; Three RF. · Optional: 148 cm RF cable can be ordered at extra cost for the replacement |
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· Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel · Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement · Hinged type lid with pneumatic power pole allows easy target change |
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· The sample holder is a rotatable and heatable stage made of the ceramic heater with copper cover · Sample holder size: 140 mm Dia. for. 4" wafer max · Rotation speed: 1 - 20 rpm adjustable for uniform coating · The holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller |
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Gas Flow Control
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Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases
o Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel · Air inlet valve is installed for vacuum release |
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Vacuum Pump Station
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· High-speed turbopump at speed 80L/S is combined with a two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed · Standard vacuum level connected with chamber: < 4.0E-5 Torr. · Optional at extra cost · If choose a 150L/S high-speed turbopump , the vacuum can reach 10-6 torr with the chamber. · For the ultra-high vacuum up to 10^-7 torr, 700S/L turbopump is needed · 150L/S high-speed turbopump |
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Water Chiller
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· One digital temperature-controlled recirculating water chiller is included. o Refrigeration range: 5~35 °C o Flow rate: 16 L/min o Pump pressure: 14 psi |
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Optional |
· Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å |
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Overall Dimensions |
Lid closed: 48" × 28" × 32" Lid open: 48" × 28" × 37" |
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Net Weight of Coater |
· 160 kg |
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Shipping Weight & Dimensions |
· Total 3 Pallets o 365 lbs, 48" x 40" x 45" o 390 lbs, 48"x 40" x 49" o 210 lbs, 48" x 40"x 30" |
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Compliance |
· CE approval |
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Warranty |
· One year's limited warranty with lifetime support |
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Application Note |
This coater may be placed into a standard glovebox with modification for thin-film battery research |
