Sapphire Crystal Growth Furnace, Electric Industrial Heater Machine

Sapphire Growth Furnace

II, S tructure description

The system mainly consists of vacuum furnace body, vacuum pumping machine, weighing sensor, crystal lifting and rotating system, heating system, control system, gas circuit system, waterway system, growth process automatic control system, installing cabinet, etc.

III, Czochralski machine

1. Small furnace cover connects a crystal czochralski machine by bellows. Czochralski machine is fixed on rack deck plate by rotatable racks.

2. Czochralski machine mainly lift and rotate crystals. It has manual and automatic two modes. The top and bottom of czochralski machine distances are equipped with limit switches to prevent from moving over limited positions. Grating ruler is applied to measure distance and send feedbacks.

3. Rotating crystal motor is a servo motor with soft start function, which forms precise closed loop speed control. It uses cog belt to drive seed rod, which makes transmission more stable.

Iv, Main technical parameters

1. Heating power: 100KW

2. Max. heating temperature: 2200 °C

3. Common heating temperature: 2050~2100 °C

4. Ultimate vacuum: 5*10-4Pa (continuous evacuation after roasting)

5. Working vacuum degree: 5*10-3Pa

6. Inflating medium: Ar (high purity)

7. Inflation pressure: ≤ 0.1MPa

8. Crucible size: 220mm*350mm (diameter*height)

9.   Seed rod rotate speed: 0~30r/mi

10. Seed rod lifting slow speed: 0~20mm/h

11. Seed rod lifting rapid speed: 0~30mm/min

12. Seed rod distance: 300mm

13. Small furnace cover distance: 200mm