Input Power

· Single phase 220 VAC 50 / 60 Hz

· 2 5 00 W (including vacuum pump and water chiller)

Source Power

· Three sputtering power sources are integrated into one control box

o DC source: 10 00 W power for coating metallic materials

Magnetron Sputtering Head

· Three 2 " DCMagnetron Sputtering Heads with water cooling jackets and shutters are included

· One Sputting Head Model also available.

o Target size requirement: 2" diameter

o Thickness range: 0.1 - 5 mm for both metallic and non-conductive targets (including backing plate)

o Optional 2" sputtering targets (or backing plate) are available upon request at extra cost.

· Customized coater: Two DC - One RF; Two RF - One DC;  Three RF (Please select from Product Options)

Vacuum Chamber

· Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel

· Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement

· Hinged type lid with pneumatic power pole allows easy target change

Sample Stage

· Sample holder is a rotatable and heatable stage made of ceramic heater with copper cover

· Sample holder size: 140 mm Dia. for. 4" wafer max

· Rotation speed: 1 - 20 rpm adjustable for uniform coating

· The holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller

Gas Flow Control

· Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases

o Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel

· Air inlet valve is installed for vacuum release

Vacuum Pump Station

· A mobile pump station is included. The sputtering coater can be placed on top of station

· High-speed turbo pump is combined with a two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed

· Standard vacuum level: < 4.0E-5 Torr. Max. vacuum level: 1.0E-6 Torr with chamber baking

Water Chiller

· One digital temperature controlled recirculating water chiller is included.

o Refrigeration range: 5~35 °C

o Flow rate: 16 L/min

o Pump pressure: 14 psi

Overall Dimensions

Lid closed: 48" × 28" × 32"

Lid open: 48" × 28" × 37"

Net Weight of Coater

· 160 kg

Shipping Weight & Dimensions

· Total 3 Pallets

· 365 lbs, 48" x 40" x 45"

· 390 lbs, 48"x 40" x 49"

· 210 lbs, 48" x 40"x 30"

Compliance

· CE approval

Warranty

· One years limited warranty with lifetime support