- Product Details
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Quick Details
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Brand Name:
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NST
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Voltage:
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5, 10V
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Power:
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3kw
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Dimension(L*W*H):
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500*500*600mm2
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Weight (KG):
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300
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Keywords:
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Multifunctional Thin Film Deposition System
Quick Details
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Machine Type:
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Thin Film Coter, Coating Equipment, Laboratory Equipment
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Marketing Type:
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Hot Product 2024
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Place of Origin:
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Uttar Pradesh, India
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Brand Name:
-
NST
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Voltage:
-
5, 10V
-
Power:
-
3kw
-
Dimension(L*W*H):
-
500*500*600mm2
-
Weight (KG):
-
300
-
Keywords:
-
Multifunctional Thin Film Deposition System
Specification
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Structure
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U-box front opening vacuum chamber, rear-mounted pumping system
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Vacuum chamber
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500×500×600mm2
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Vacuum system configuration
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Compound molecular pump, mechanical pump, gate valve
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Ultimate pressure
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≤6. 67×10-5Pa (after baking and degassing)
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Vacuum recovery system
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It can reach 6.67×10-4pa in 45 minutes (after the system is exposed to the atmosphere for a short time and is filled with dry
nitrogen) |
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Electron beam evaporation source
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E type electron gun
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Anode voltage: 6kv、8kv;
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Quantity (set)
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1
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Crucible
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Water-cooled crucible, four point design, each capacity of 11ml
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Power
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0~6 KW adjustable
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Resistance evaporation source (optional)
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Voltage
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5, 10V
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Power
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Current 300A，the maximum output 3kw
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Quantity
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One set, Switchable
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Water cooling electrode
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Three roots, make up two evaporation boats
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Type and size of workpiece frame
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Substrate size: compatible with 4″substrate
Max substrate heating temperature 800℃±1℃ Substrate rotates continuously, rotation speed:5-60 rpm The distance between the substrate and the evaporation source is adjustable from 300 to 350mm Manually controlled sample baffle assembly: 1 set |
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Gas circuit system
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1-circuit 200SCCM mass flow controller
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Quartz crystal oscillation film thickness controller
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Thickness monitoring range: 0~99u9999A;
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Floor Space
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Main Set
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900×800mm2
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Electrical Cabinet
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800×800mm2 (two)
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Product Description
Electron beam evaporation coating system
Electron beam evaporation coating system is used for preparing conductive film, semiconductor film, ferroelectric film, optical film, etc. It is widely used in colleges and universities, scientific research institutions and small batch production.
Packing & Delivery
To better ensure the safety of your goods, professional, environmentally friendly, convenient and efficient packaging services will be provided.
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