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Chamber type
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Vertical and horizontal method of multi-chamber
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Applied material
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Glass and other plastic, metal materials
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Substrate size
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Vertical type
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2,200mm x 2,500mm
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Horizontal type
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1,500mm x 1,800mm
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Tact time
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60 sec or less (Static method) 35 sec or less (Dynamic method)
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Coating source
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Sputter source
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Rotary cathode, Planar cathode
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Thermal source
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Crucible, E-beam
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Coating material
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Metal material
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Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material
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Reactive material
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TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material
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Power supply
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DC, Pulse DC, MF
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Thickness uniformity
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±10% or less (Static film) ±5% or less (Moving film)
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Measuring instrument
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Sheet resistance, optic (Transmittance, reflectance, color-difference meter)
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plasma emission monitor, RGA
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Household appliances field
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Decorative coating on household products and exterior of mobile devices
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Energy field
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Architectural window glass, solar cell
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Other industrial field
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Metal thin film and oxide thin film, multi-layered thin film coating based application field
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