- Product Details
- {{item.text}}
Quick Details
-
Place of Origin:
-
Hebei, China
-
Brand Name:
-
BOVCEED
-
Model Number:
-
SS III
-
Output Frequency:
-
10-80kHz
-
Power Range:
-
6-120kW
-
Input Power:
-
AC380V±10%, three phase four wire system, 50-60Hz
-
Output Mode:
-
Pulse
-
Pulse Width:
-
10-90%
-
Output Features:
-
Constant current / constant power / constant voltage
-
Arc extinguishing time:
-
≤3μs
-
Output Stability:
-
0.5%
-
Cooling Mode:
-
6-12kW air-cooled; 20-120kW water-cooled
-
Communication Mode:
-
Analog/RS485/RS232
Quick Details
-
Output Power:
-
6-120kW
-
Input Voltage:
-
220V or 380V
-
Output Voltage:
-
No load 1000V [peak voltage], No load 1000V [peak voltage]
-
Place of Origin:
-
Hebei, China
-
Brand Name:
-
BOVCEED
-
Model Number:
-
SS III
-
Output Frequency:
-
10-80kHz
-
Power Range:
-
6-120kW
-
Input Power:
-
AC380V±10%, three phase four wire system, 50-60Hz
-
Output Mode:
-
Pulse
-
Pulse Width:
-
10-90%
-
Output Features:
-
Constant current / constant power / constant voltage
-
Arc extinguishing time:
-
≤3μs
-
Output Stability:
-
0.5%
-
Cooling Mode:
-
6-12kW air-cooled; 20-120kW water-cooled
-
Communication Mode:
-
Analog/RS485/RS232
SS III cheap 1000v dc modular DC Pulse Magnetron Sputtering Power supply
|
Technical Specification of DC Pulse Magnetron Sputtering Power Supply, SS III Series |
|
|
Power Range |
6-120kW |
|
Input Power |
AC380V ± 10%, three phase four wire system, 50-60Hz |
|
Output Mode |
Pulse |
|
Pulse Width |
10-90% |
|
Output Voltage |
No load 1000V [peak voltage] |
|
Output Features |
Constant current / constant power / constant voltage |
|
Arc extinguishing time |
≤ 3μs |
|
Output Stability |
0.5% |
|
Cooling Mode |
6-12kW air-cooled; 20-120kW water-cooled |
|
Service Environment |
Ambient Temperature 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive flammable gas, good ventilation |
|
Cooling Water |
Clean without any minerals and other soluble substances Water Temperature 20-40℃ Pressure 0.15±0.05MPa |
|
Communication Mode |
Analog/RS485/RS232 |
|
Description: The power supply output properties can be adjusted according to application need |
|
SS III series of magnetron sputtering power supply works in two-stage high frequency conversion mode with unipolar output mode, independent adjustment of the current supplied and the pulse width. When it works in pulse mode, the sputtering target works in high frequency intermittent state, enabling the stored charge on surface of the target to have certain discharging time. This is beneficial to restrain arc discharge and surface poisoning of the target, suitable for reaction sputtering film.
