- Product Details
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Quick Details
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Place of Origin:
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Henan, China
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Microwave operating mode:
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TM013
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Operating pressure range:
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10~250Torr
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Reactor:
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140mm
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Sample stage:
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100mm
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Size:
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customized
Quick Details
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Warranty:
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3 years
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Brand Name:
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CYKY
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Model Number:
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CY-MPCVD
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Place of Origin:
-
Henan, China
-
Microwave operating mode:
-
TM013
-
Operating pressure range:
-
10~250Torr
-
Reactor:
-
140mm
-
Sample stage:
-
100mm
-
Size:
-
customized
MPCVD single crystal diamond deposition equipment
Application
Preparation of high-quality single crystal diamond;
Preparation of high-quality polycrystalline free-standing diamond films;
Preparation of high quality polycrystalline diamond films;
Preparation of various carbon nano films such as graphene, carbon nanotubes, fullerenes and diamond films.
Features
a. Stainless steel cavity type 6kw microwave plasma equipment, high power density;
b. The water-cooled substrate stage and the water-cooled metal chamber ensure the system can work stably for a long time;
c. The substrate temperature is achieved by microwave plasma self-heating;
d. The vacuum measuring instrument adopts a full-range vacuum gauge, which can accurately measure the background vacuum and working gas pressure;
e. The vacuum pump and valve adopt turbo molecular pump (the ultimate vacuum is 1×10-5Pa) and the rotary vane mechanical vacuum pump (the ultimate vacuum is 1Pa), and the system can automatically control the deposition pressure;
f. Cooling water circulation system to ensure long-term safe and stable operation of the device under high power;
g. 15-inch touch screen, PLC automatic control, can set the temperature or pressure to be constant, can save and reuse up to 20 sets of process files;
Fully automatic process control module, which can stably and reliably prepare high-quality diamond films and crystals
Technical specifications
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Microwave system (Sairem microwave source, France) |
microwave frequency |
2450±25MHz |
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output power |
0.6kw~6kw continuous adjustable |
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Microwave tuning |
3-stub tuner Mode conversion antenna |
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Microwave reflection protection |
Circular,Water load |
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Microwave operating mode |
TM013 |
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microwave leak |
≤ 2 mw/cm2 |
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vacuum system |
Operating pressure range |
10~250Torr |
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Automatic pressure control |
40~250Torr |
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Vacuum pump |
4.4L/s rotary-vane vacuum pump |
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Vacuum integrity |
< 1.0x10 -9 Pa * m 3 /sec (by Helium leak detector) |
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Pressure holding capacity |
The pressure rise is less than 0.2 Torr every 24 hours |
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Ultimate vacuum |
0.1Pa(7.5 x10 -4 Torr) |
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Vacuum measurement |
Brand film gauge |
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Vacuum reactor |
Reactor materials and structures |
double-layer water-cooled stainless steel |
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Vacuum seal |
Metal seal + fluororubber ring seal (load door) |
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Reactor ID |
φ140mm |
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Sample table window |
105x50mm Rectangular port, Front door sealed with Fluorine O-ring |
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Watch window |
Two ports, CF35 large bore, 180 ° distribution |
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Temperature measurement window |
The horizontal angle of the two windows is 25~30°, 180° distribution; The window is convenient to detect the temperature of the sample stage from the oblique angle of the upper part of the reactor downward |
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Sample stage |
Electric lift water-cooled substrate platform φ100mm,Adjustable height range 0~70mm |
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When the diameter of molybdenum substrate is ≥50mm, the plasma fireball can cover the whole substrate stage at 5000W and 180torr |
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Substrate temperature 250~1400℃ Depending on the process parameters |
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Gas channel |
Flowmeter and flow control valve imported from Japan |
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system-provided 4-channel MFC |
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4MFC maximum flow:H2: 1000sccm,CH4:100sccm,O2:20sccm,N2:2sccm |
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Temperature measurement system |
German Raytek infrared temperature measurement system, temperature range: 300 ~ 1300 ℃ |
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Systems software |
15”touch screen with PLC control, friendly user operating interface |
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The system supports two levels of users: engineer and operator, and provides user authority management function |
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The system is equipped with automatic protection such as water shortage, air shortage, power supply phase failure, fireball jump, over temperature overload, ignition and so on |
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Up to 10 sets of process recipes can be set, each set has 40 rows of data, the production process is automatically controlled by the process recipes, and the process data can be backed up and exported via U disk |
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The system comes with fully automatic air extraction, ignition, heating, cooling and other preset processes, easy for users to operate |
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Fully automatic temperature control and air pressure control greatly reduce the workload of system operators |
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1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the dental equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1. Western Union
2. PayPal
3. Secure Payment through Alibaba
4. Telegraphic transfer
5. L/C
